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ISBN:9781457717673

1displacement measurement 1electrostatics 1energy harvesting 1microactuators 1micromechanical devices 1microsensors 1nanopositioning 1nanosensors

1Behrens, Sam 1Rakotondrabe, Micky

Facets

1displacement measurement 1electrostatics 1energy harvesting 1microactuators 1micromechanical devices 1microsensors 1nanopositioning 1nanosensors

1Behrens, Sam 1Rakotondrabe, Micky

Title
Creator
Date

A 3-DoF MEMS ultrasonic energy harvester

- Fowler, Anthony G., Moheimani, S. O. Reza, Behrens, Sam

Creator: Fowler, Anthony G. , Moheimani, S. O. Reza , Behrens, Sam
Resource Type: conference paper
Date: 2012

Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing

- Rakotondrabe, Micky, Fowler, Anthony G., Moheimani, S. O. Reza

Creator: Rakotondrabe, Micky , Fowler, Anthony G. , Moheimani, S. O. Reza
Resource Type: conference paper
Date: 2012

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